West Melbourne, Fl. USA, July 19, 2002 – Hills, Inc. has successfully completed the first phase of a micro electromechanical system (MEMS) project for MCNC, a research company based in North Carolina. The process developed by Hills, which produced an MCNC-patented micro actuator, allows the MEMS to have unlimited thickness as opposed to conventional silicon wafer MEMS manufacturing techniques that limit thickness to a few microns. Features as small as 0.5 microns have been produced in the MCNC product.

The patented Hills’ process uses micro-precision multicomponent polymer extrusion to produce a continuous strand of the MEMS at about 200 meters per minute. The strand can then be cut into individual MEMS, or they can be assembled with other components before cutting. If the desired MEMS is 1mm long, the production rate is an amazing 200,000 per minute.

The MCNC micro actuator uses three different polymers, each with special properties. The polymers are extruded in a complex cross-section to form a continuous strand. The strand is cut to the desired length and assembled to make the final MEMS. The cross-section of the MCNC actuator is shown below.

The Hills process can be used to make practically any cross section, making it available for production of a wide variety of MEMS. Because polymers are used and thickness limitations are not a factor, the Hills process can make MEMS that are not possible with other techniques. The Hills process also has the following advantages over conventional MEMS manufacturing methods:

- Continuous high production rates

- Low-cost polymeric materials

- No hazardous chemicals

- No thickness limit

- No clean-room required

- Features as small as 0.3 microns possible

Hills believes the new process will be able to improve many other MEMS products. Hills, Inc of West Melbourne Florida USA is a world leader in multicomponent polymer extrusion technology. Other recent developments include production of 300 nanometers diameter polyester nanofiber and nanotubing. For more information contact Jeff Haggard, Hills’ VP of Technology, at 321-724-2370 ext. 215 or jhaggard@hillsinc.net